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enScribe™ Product line

A novel gas molecule decreasing global warming potential in semiconductor manufacturing

February 2021

enScribe™ Product line

A novel gas molecule decreasing global warming potential in semiconductor manufacturing

  • World Alliance Member
  • Featured Solution
  • Labelled Solution
Label Date February 3, 2021
From France
Maturity stage TRL 9 / CRI 5-6 - Market competition driving widespread deployment &/"Bankable" grade asset class

Fabrication of semiconductor device structures requires several gas-phase processes for controlled growth/removal of materials in order to create specific architectures. Air Liquide developed a new portfolio of advanced etching speciality gases to solve both technological and environmental future challenges in the semiconductor industry. It brings two kinds of advantages to semiconductor customers: not only do they address their new technical challenges for more advanced and complicated device, but they also bring environmental benefits by reducing the overall GWP footprint of their fab.

The Environmental Benefits

  • Reduces the process time by 50%
  • Improving a-C mask selectivity 3-4 times compared with C4F6
  • A thousand time smaller (1/1000) GWP compared with conventional fluorocarbons (a-C4F8)
  • enScribe™ G1 gas reduces client's fab CO2 emission by 4% - equivalent to the reduction of CO2 emission from 29,000 cars

The Financial Benefits

  • Less than 5 years payback time
  • Improve yield by 10 % compared to mainstream alternative

Activity Region

  • Headquarters
  • Activity

Company Profile

Air Liquide

A world leader in gases, technologies and services for Industry and Health.

Headquarters 75007 Paris, France
Type Company
View company profile Solution website

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The information set out above, is solely for the purposes of information and the Solar Impulse Foundation does not provide any guarantee as to its authenticity, completeness or accuracy. This information does not constitute investment advice or a recommendation to buy into, transact or to enter into any agreement with any of the parties or persons mentioned above. Potential investors or interested parties are solely responsible for their investment or business decisions and for performing any due diligence required by the circumstances. The innovator Air Liquide has asserted ownership of the intellectual property rights for images, videos, and content showcased above, affirming full and unrestricted usage rights, and has provided explicit permission for the Solar Impulse Foundation to publish such information designated as "public" in the application form.